Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2011.07a
- /
- Pages.1495-1496
- /
- 2011
A study on the pore size control of nano template by anodic aluminum oxidation
양극산화를 이용한 나노템플레이트 기공 크기 제어에 관한 연구
- Lee, Su-Ho (Kunsan Nat. Univ.) ;
- Seo, Mun-Su (Kunsan Nat. Univ.) ;
- Yoo, Hyun-Min (Kunsan Nat. Univ.) ;
-
Lee, Jae-Hyeong
(Kunsan Nat. Univ.)
;
- Joung, Yeun-Ho (Hanbat Nat. Univ.) ;
-
Lim, Dong-Gun
(Chungju Nat. Univ.)
;
-
Hwang, Hyeon-Seok
(Seoil Univ.)
- 이수호 (군산대학교 전자공학과) ;
- 서문수 (군산대학교 전자공학과) ;
- 유현민 (군산대학교 전자공학과) ;
-
이재형
(군산대학교 전자공학과)
;
- 정연호 (한밭대학교 제어계측공학과) ;
-
임동건
(충주대학교 전자공학과)
;
-
황현석
(서일대학 전기과)
- Published : 2011.07.20
Abstract
Anodic aluminum oxide (AAO) nanotemplates for nano electronic device applications have been attracting increasing interest because of ease of fabrication, low cost process, and possible fabrication in large area. The size and density of the nanostructured materials can be controlled by changing the pore diameter and the pole density of AAO nanotemplate. In this paper, AAO nanotemplate was fabricated by second anodization method. In addition, effects of electrolyte and anodization voltate on the microstructure of porous alumina films were investigated. Vertically well aligned pores had the average pore sizes of 15-70 nm and the length of approximately 40
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