한국자기학회:학술대회 개요집 (Proceedings of the Korean Magnestics Society Conference)
- 한국자기학회 2011년도 자성 및 자성재료 국제학술대회
- /
- Pages.59-61
- /
- 2011
- /
- 2233-9485(pISSN)
- /
- 2233-9574(eISSN)
Resist Trimming Technique in Oxygen Plasma for Sub-30nm Pillar Array
- Kim, Bong-Ho (Department of Electronic Engineering, Hanyang University) ;
- Kim, Dae-Hong (Department of Electronic Engineering, Hanyang University) ;
- Kwon, Ji-Hun (Department of Electronic Engineering, Hanyang University) ;
- Chun, Sung-Woo (Department of Electronic Engineering, Hanyang University) ;
- Choi, Seon-Jun (Department of Electronic Engineering, Hanyang University) ;
- Lee, Seung-Beck (Department of Electronic Engineering, Hanyang University)
- 발행 : 2011.12.05