Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2011.06a
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- Pages.495-496
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- 2011
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- 2005-8446(pISSN)
Development of Wafer Accurate Transfer System for LED Application using Pneumatic actuator
공압 액추에이터를 적용한 LED용 Wafer 정밀 공급 시스템 개발
- Oh, J.O. ;
- Yoon, S.H. ;
- Park, G.H. ;
- Kim, G.C. ;
- Baek, S.H.
- Published : 2011.06.01