한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2011년도 제40회 동계학술대회 초록집
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- Pages.477-477
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- 2011
Electrical and mechanical property of ZnO wire using catalyst-free chemical vapor deposition
- Lee, Jin-Kyung (Division of Quantum Phases & Devices, School of Physics, Konkuk University) ;
- Jung, Un-Seok (Division of Quantum Phases & Devices, School of Physics, Konkuk University) ;
- Kim, Hak-Seong (Division of Quantum Phases & Devices, School of Physics, Konkuk University) ;
- Yun, Ho-Yeo (Division of Quantum Phases & Devices, School of Physics, Konkuk University) ;
- Seo, Mi-Ri (Division of Quantum Phases & Devices, School of Physics, Konkuk University) ;
- Jonathan, Ho (Division of Quantum Phases & Devices, School of Physics, Konkuk University) ;
- Choi, Mi-Ri (School of Electrical ngineering, Korea University) ;
- Wan, Jae (School of Electrical ngineering, Korea University) ;
-
Kim, Gyu-Tae
(School of Electrical ngineering, Korea University)
;
- Lee, Sang-Wook (Division of Quantum Phases & Devices, School of Physics, Konkuk University)
- 발행 : 2011.02.09
초록
In this paper, we synthesize ZnO wire on Si substrate by catalyst-free thermal chemical vapor deposition (CVD). Each ZnO wire is grew up at different condition such as temperature and O2 flow rate. The Young's modulus of individual ZnO wires were estimated using quasi-static and dynamic measurements, as well as resonance frequency measurements. Using this system, current-voltage characteristics of each ZnO wire structure fabricated on a trench were measured. A new concept of electromechanical device structure combined with the piezoelectric effect of ZnO will be suggested in the end of this paper.