한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2011년도 제40회 동계학술대회 초록집
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- Pages.193-193
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- 2011
Fabrication of PZT Film by a Single-Step Spin Coating Process
- Oh, Seung-Min (Electronic Materials Center, Korea Institute of Science and Technology) ;
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Kang, Min-Gyu
(Electronic Materials Center, Korea Institute of Science and Technology) ;
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Do, Young-Ho
(Electronic Materials Center, Korea Institute of Science and Technology) ;
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Kang, Chong-Yun
(Electronic Materials Center, Korea Institute of Science and Technology) ;
- Nahm, Sahn (Department of Materials Science and Engineering, Korea University) ;
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Yoon, Seok-Jin
(Electronic Materials Center, Korea Institute of Science and Technology)
- 발행 : 2011.02.09
초록
To obtain ceramic films, the sol-gel coating technique has been broadly used with heat treatment, but crack formation tend to occur during heat treatment in thick sol-gel films. We prepared PZT thin films by sol-gel method with single-step spin coating process. The PZT solution have been synthesized using lead acetate (