한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2011년도 제40회 동계학술대회 초록집
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- Pages.72-72
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- 2011
Structural Evolution of ZnO:Ga Thin Film on Profiled Substrate Grown by Radio Frequency Sputtering
- Sun, J.H. (Department of Advanced Materials Engineering and BK21 Education Center of Mould Technology for Advanced Materials and Parts, Chosun University) ;
- Kim, J.H. (Department of Advanced Materials Engineering and BK21 Education Center of Mould Technology for Advanced Materials and Parts, Chosun University) ;
- Ahn, B.G. (Department of Advanced Materials Engineering and BK21 Education Center of Mould Technology for Advanced Materials and Parts, Chosun University) ;
- Park, S.Y. (Department of Advanced Materials Engineering and BK21 Education Center of Mould Technology for Advanced Materials and Parts, Chosun University) ;
- Jung, E.J. (Department of Advanced Materials Engineering and BK21 Education Center of Mould Technology for Advanced Materials and Parts, Chosun University) ;
- Lee, J.H. (Department of Advanced Materials Engineering and BK21 Education Center of Mould Technology for Advanced Materials and Parts, Chosun University) ;
- Kang, H.C. (Department of Advanced Materials Engineering and BK21 Education Center of Mould Technology for Advanced Materials and Parts, Chosun University)
- 발행 : 2011.02.09
초록
Recently, Zinc oxide (ZnO) nano-structures have been received attractive attention because of their outstanding optical and electrical properties. It might be a promising material considered for applications to photonic and electronic devices such as ultraviolet light emitting diode, thin film transistor, and gas sensors. ZnO nano-structures can be typically synthesized by the VLS growth mode and self-assembly. In the VLS growth mode using various growth techniques, the noble metal catalysts such as Au and Sn were used. However, the growth of ZnO nano-structures on nano-crystalline Au seeds using radio frequency (RF) magnetron sputtering might be explained by the profile coating, i.e. the ZnO nano-structures were a morphological replica of Au seeds. Ga doped ZnO (ZnO:Ga) nano-structures using this concept were synthesized and characterized by XRD, AFM, SEM, and TEM. We found that surface morphology is drastically changed from initial islands to later sun-flower typed nano-structures. We will present the structural evolution of ZnO:Ga nano-structures with increasing the film thickness.