한국신재생에너지학회:학술대회논문집
- 한국신재생에너지학회 2011년도 춘계학술대회 초록집
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- Pages.127.1-127.1
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- 2011
RTP 공정을 통한 태양전지용 AZO 박막의 후열처리 특성연구
A Study on Properites of PV Solar cell AZO thin films post-annealing by RTP technique
- 양현훈 (목포대학교) ;
- 김한울 (목포대학교) ;
- 한창준 (목포대학교) ;
- 소순열 (목포대학교) ;
- 박계춘 (목포대학교) ;
- 이진 (목포대학교) ;
- 정해덕 (목포대학교) ;
- 이석호 (서남권 청정에너지기술연구원) ;
- 백수웅 (서남권 청정에너지기술연구원) ;
- 나길주 (목포과학대학) ;
- 정운조 (조선이공대학)
- Yang, Hyeon-Hun ;
- Kim, Han-Wool ;
- Han, Chang-Jun ;
- So, Soon-Youl ;
- Park, Gye-Choon ;
- Lee, Jin ;
- Chung, Hea-Deok ;
- Lee, Suk-Ho ;
- Back, Su-Ung ;
- Na, Kil-Ju ;
- Jeong, Woon-Jo
- 발행 : 2011.05.26
초록
In this paper, ZnO:Al thin films with c-axis preferred orientation were prepared on Soda lime glass substrates by RF magnetron sputtering technique. AZO thin film were prepared in order to clarify optimum conditions for growth of the thin film depending upon process, and then by changing a number of deposition conditions and substrate temperature conditions variously, structural and electrical characteristics were measured. For the manufacture of the AZO were vapor-deposited in the named order. It is well-known that post-annealing is an important method to improve crystal quality. For the annealing process, the dislocation nd other defects arise in the material and adsorption/decomposition occurs. The XRD patterns of the AZO films deposited with grey theory prediction design, annealed in a vacuum ambient(