한국신재생에너지학회:학술대회논문집
- 2011.05a
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- Pages.126.2-126.2
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- 2011
A Study on Properites of PV Solar cell n-type ZnS Using RF Sputtering Method
RF스퍼터링을 이용한 태양전지용 n-type ZnS 특성연구
- Yang, Hyeon-Hun ;
- Kim, Han-Wool ;
- Han, Chang-Jun ;
- So, Soon-Youl ;
- Park, Gye-Choon ;
- Lee, Jin ;
- Chung, Hea-Deok ;
- Lee, Suk-Ho ;
- Back, Su-Ung ;
- Na, Kil-Ju ;
- Jeong, Woon-Jo
- 양현훈 (목포대학교) ;
- 김한울 (목포대학교) ;
- 한창준 (목포대학교) ;
- 소순열 (목포대학교) ;
- 박계춘 (목포대학교) ;
- 이진 (목포대학교) ;
- 정해덕 (목포대학교) ;
- 이석호 (서남권 청정에너지기술연구원) ;
- 백수웅 (서남권 청정에너지기술연구원) ;
- 나길주 (목포과학대학) ;
- 정운조 (조선이공대학)
- Published : 2011.05.26
Abstract
ZnS thin films were deposited with the radio frequency magnetron sputtering technique at various temperatures and sputtering powers. With the increase in the deposition temperature and the decrease in the radio frequency sputtering power, the crystallinity was increased and the surface roughness was decreased, which lead to the decrease in the electrical resistivity of the film. It is also clearly observed that, the intensity of the (111) XRD peak increases with increasing the substrate temperature. On the other hand, as seen in the FWHM decreased with increasing the substrate temperature. Since the FWHM of the (111) diffraction peak is inversely properties to the grain size of the film, then grain size of ZnS thin film increases with increasing the substrate temperature. The electrical resistivity and optical transmittance of the ZnS film as a function of the post-annealing temperature. It can be seen that with the annealing temperature set at