한국신재생에너지학회:학술대회논문집
- 2011.05a
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- Pages.121.2-121.2
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- 2011
Fabrication of a Transparent Electrode for a Flexible Organic Solar Cell in Atomic Layer Deposition
ALD 공정을 이용한 플렉시블 유기태양전지용 투명전극 형성
- Published : 2011.05.26
Abstract
Aluminum-doped Zinc Oxide (AZO) is considered as an excellent candidate to replace Indium Tin Oxide (ITO), which is widely used as transparent conductive oxide (TCO) for electronic devices such as liquid crystal displays (LCDs), organic light emitting diodes (OLEDs) and organic solar cells (OSCs). In the present study, AZO thin film was applied to the transparent electrode of a channel-shaped flexible organic solar cell using a low-temperature selective-area atomic layer deposition (ALD) process. AZO thin films were deposited on Poly-Ethylene-Naphthalate (PEN) substrates with Di-Ethyl-Zinc (DEZ) and Tri-Methyl-Aluminum (TMA) as precursors and
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