한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2010년도 제39회 하계학술대회 초록집
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- Pages.306-306
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- 2010
High quality fast growth nano-crystalline Si film synthesized by UHF assisted HF-PECVD
- Kim, Youn-J. (Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
- Choi, Yoon-S. (Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
- Choi, In-S. (Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
- Han, Jeon-G. (Center for Advanced Plasma Surface Technology, Sungkyunkwan University)
- 발행 : 2010.08.18
초록
A high density (>
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