Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2010.08a
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- Pages.164-164
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- 2010
Local structure of transparent flexible amorphous M-In-ZnO semiconductor
- Son, L.S. ;
- Kim, K.R. ;
- Yang, D.S. ;
- Lee, J.C. ;
- Sung, N. ;
- Lee, J. ;
- Kang, H.J.
- Published : 2010.08.18
Abstract
The impurity doped ZnO has been extensively studied because of its optoelectric properties. GIZO (Ga-In-Zn-O) amorphous oxide semiconductors has been widely used as transparent flexible semiconductor material. Recently, various amorphous transparent semiconductors such as IZO (In-Zn-O), GIZO, and HIZO (Hf-In-Zn-O) were developed. In this work, we examined the local structures of IZO, GIZO, and HIZO. The local coordination structure was investigated by the extended X-ray absorption fine structure. The IZO, GIZO and HIZO thin films ware deposited on the glass substrate with thickness of 400nm by the radio frequency sputtering method. The targets were prepared by the mixture of
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