Proceedings of the Korean Society for Noise and Vibration Engineering Conference (한국소음진동공학회:학술대회논문집)

  • 2010.10a
  • /
  • Pages.497-498
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  • 2010
  • /
  • 1598-2548(pISSN)
The Korean Society for Noise and Vibration Engineering (한국소음진동공학회)
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Analysis of 3DOF Micro Vibration for Semiconductor Manufacturing

반도체 공정용 3 자유도 미진동 해석

  • Published : 2010.10.27
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