Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2010.11a
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- Pages.667-668
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- 2010
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- 2005-8446(pISSN)
Dynamic Characteristics of Magnetic Bearing System for A Compound Turbomolecular Vacuum Pump
2,500 l/s 급 복합분자펌프를 위한 자기부상계 구동특성
- Published : 2010.11.11