Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2010.11a
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- Pages.391-392
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- 2010
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- 2005-8446(pISSN)
Evaluation of driving characteristics and strain for Nano-Postioning Mechanism
나노급 위치결정기구의 변형율 예측과 거동특성
- Kwak, N.S. ;
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Kim, J.Y.
;
- Park, D.K. ;
- Lee, G.
- Published : 2010.11.11