Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2010.11a
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- Pages.255-256
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- 2010
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- 2005-8446(pISSN)
Development of high speed white light interferometric Microscope for bump of semiconductor
반도체 bump 측정을 위한 고속 백색광 위상 간섭계 개발
- Ko, Kuk-Won ;
- Kim, Jae-Hawn ;
- Seo, Sang-Jun (NCB Networks)
- Published : 2010.11.11