Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)

  • 2010.11a
  • /
  • Pages.255-256
  • /
  • 2010
  • /
  • 2005-8446(pISSN)
Korean Society for Precision Engineering (한국정밀공학회)
권호 표지

Development of high speed white light interferometric Microscope for bump of semiconductor

반도체 bump 측정을 위한 고속 백색광 위상 간섭계 개발

  • Published : 2010.11.11
Download PDF
⟨ Previous Next ⟩

Abstract

Keywords