한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2010년도 춘계학술회의 초록집
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- Pages.21-21
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- 2010
Low-temperature crystallization of high-dielectric (Ba,Sr)$TiO_3$ thin films for embedded capacitors
- Cho, Kwang-Hwan (Electronic Materials Center, Korea Institute of Science and Technology) ;
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Kang, Min-Gyu
(Electronic Materials Center, Korea Institute of Science and Technology) ;
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Kang, Chong-Yun
(Electronic Materials Center, Korea Institute of Science and Technology) ;
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Yoon, Seok-Jin
(Electronic Materials Center, Korea Institute of Science and Technology)
- 발행 : 2010.03.25
초록
(Ba,Sr)
키워드