한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2010년도 하계학술대회 논문집
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- Pages.340-340
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- 2010
HBr/Ar 가스를 이용한 Pb(Zr,Ti)$O_3$ 식각 특성 연구
Etch characteristics of Pb(Zr,Ti)$O_3$ by using HBr/Ar gas mixtures
- Kim, Young-Keun (Dept. of Control and instrumentation Engineering, Korea University) ;
- Son, Hyun-Jin (Dept. of Control and instrumentation Engineering, Korea University) ;
- Lee, Seung-Hun (Dept. of Control and instrumentation Engineering, Korea University) ;
- Kwon, Kwang-Ho (Dept. of Control and instrumentation Engineering, Korea University)
- 발행 : 2010.06.16
초록
본 연구에서는 유도결합형 플라즈마(ICP)를 이용하여, HBr/Ar 가스의 조성비 변화에 따른 Pb(Zr,Ti)