한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2010년도 하계학술대회 논문집
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- Pages.243-243
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- 2010
대면적 다결정 실리콘 태양전지 제작을 위한 건식식각에 관한 연구
A study on Dry Etching for Lage Area Multi-Cystalline Silicon Solar Cell
- 한규민 (충남대학교 전자.전파.정보통신공학부) ;
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유진수
(한국에너지기술연구원 태양광연구단) ;
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유권종
(한국에너지기술연구원 태양광연구단) ;
- 권준영 (충북대학교 전기공학과) ;
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최성진
(한국에너지기술연구원 태양광연구단) ;
-
이희덕
(충남대학교 전자.전파.정보통신공학부)
- Han, Kyu-Min (Chungnam National University) ;
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Su, Jin
(Korea Institute of Energy Research) ;
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Yoo, Kwon-Jong
(Korea Institute of Energy Research) ;
- Kwon, Jung-Young (Chunbuk national University) ;
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Choi, Sung-Jin
(Korea Institute of Energy Research) ;
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Lee, Hi-Deok
(Chungnam National University)
- 발행 : 2010.06.16
초록
This paper two different etching, HF : HNO3 :DI and RIE were used for etching in multi-crystalline Silicon(Mc-Si) solar cell fabrication. The wafers etched in RIE texture showed low reflectance compared to the wafers etched in Acid soultion after SiNx deposition. In light current-voltage results, the cells etched in RIE texture exhibited higher short circuit current and open circuit voltage than those of the cells etched in acid solution. We have obtained 15.1% conversion efficiency in large area(