한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2010년도 하계학술대회 논문집
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- Pages.165-165
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- 2010
Optical and textural properties of AZO:H thin films by RF magneton sputtering system with various working pressures
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박춘배
(원광대학교)
- Hwang, Seung-Taek (Wonkwang University) ;
- So, Soon-Jin (Knowledge on Inc.) ;
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Park, Choon-Bae
(Wonkwang University)
- 발행 : 2010.06.16
초록
AZO:H films were prepared by RF magnetron sputtering system with a AZO (2wt%