Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2010.06a
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- Pages.28-28
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- 2010
Low-temperature crystallized BST thin films by excimer laser annealing for embedded RF tunable capacitor
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Kang, Min-Gyu
(Electric Materials Center, Korea Institute of Science and Technology) ;
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Do, Young-Ho
(Electric Materials Center, Korea Institute of Science and Technology) ;
- Oh, Seung-Min (Electric Materials Center, Korea Institute of Science and Technology) ;
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Kang, Chong-Yun
(Electric Materials Center, Korea Institute of Science and Technology) ;
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Kim, Sang-Sig
(School of Electrical Engineering, Korea University) ;
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Yoon, Seok-Jin
(Electric Materials Center, Korea Institute of Science and Technology)
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강민규
(한국과학기술연구원 전자재료센터) ;
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도영호
(한국과학기술연구원 전자재료센터) ;
- 오승민 (한국과학기술연구원 전자재료센터) ;
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강종윤
(한국과학기술연구원 전자재료센터) ;
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김상식
(고려대학교 전기전자전파공학과) ;
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윤석진
(한국과학기술연구원 전자재료센터)
- Published : 2010.06.16
Abstract
This study realized low-temperature crystallization process of the