한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2010년도 하계학술대회 논문집
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- Pages.27-27
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- 2010
도핑량에 따른 다공성 3C-SiC 박막의 전기 및 광학적 특성
Electrical and optical characteristics of porous 3C-SiC thin films with dopants
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Kim, Kan-San
(University of Ulsan) ;
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Chung, Gwiy-Sang
(University of Ulsan)
- 발행 : 2010.06.16
초록
This paper describes the electrical and optical characteristics of