Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2010.06a
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- Pages.20-20
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- 2010
Excimer laser annealing of sol-gel derived PZT thin films
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Do, Young-Ho
(Electronic Materials Center, Korea Institute of Science and Technology) ;
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Kang, Min-Gyu
(Electronic Materials Center, Korea Institute of Science and Technology) ;
- Oh, Seung-Min (Electronic Materials Center, Korea Institute of Science and Technology) ;
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Kang, Chong-Yun
(Electronic Materials Center, Korea Institute of Science and Technology) ;
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Yoon, Seok-Jin
(Electronic Materials Center, Korea Institute of Science and Technology)
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도영호
(한국과학기술연구원 전자재료센터) ;
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강민규
(한국과학기술연구원 전자재료센터) ;
- 오승민 (한국과학기술연구원 전자재료센터) ;
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강종윤
(한국과학기술연구원 전자재료센터) ;
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윤석진
(한국과학기술연구원 전자재료센터)
- Published : 2010.06.16
Abstract
The effect of excimer laser annealing on the structural and dielectric behaviors of