한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2010년도 하계학술대회 논문집
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- Pages.17-17
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- 2010
Highly sensitive CO sensing properties of multilayered $TiO_2$ thin films by colloidal templating
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윤석진
(한국과학기술연구원)
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Moon, Hi-Gyu
(Thin Film Materials Research Center, Korea Institute of Science and Technology (KIST)) ;
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Shim, Young-Seok
(Thin Film Materials Research Center, Korea Institute of Science and Technology (KIST)) ;
- Jang, Ho-Won (Thin Film Materials Research Center, Korea Institute of Science and Technology (KIST)) ;
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Kim, Jin-Sang
(Thin Film Materials Research Center, Korea Institute of Science and Technology (KIST)) ;
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Park, Hyung-Ho
(Department of Materials science and Engineering, Yonsei University) ;
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Yoon, Seok-Jin
(Thin Film Materials Research Center, Korea Institute of Science and Technology (KIST))
- 발행 : 2010.06.16
초록
We investigate CO gas sensing properties of multilayered TiO2 thin film gas sensors fabricated by colloidal templating of 300 nm of polymer spheres. Compared with plain films, the multilayered films show enhanced gas sensing with higher sensitivity and faster response. Also, colloidal templating by using smaller spheres (300 nm in diameter) leads to close-packed multilayered TiO2 thin films with very large-scale. This result suggest that understanding and control of the structures on the sensing properties of multilayered TiO2 thin films by colloidal templating is important in developing the films for real applications.
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