Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2010.02a
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- Pages.454-454
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- 2010
Optical properties of the $O_2$ plasma treatment on BZO (ZnO:B) thin films for TCO of a-Si solar cells
- Yoo, Ha-Jin (Department of Electrophysics, Kwangwoon University) ;
- Son, Chang-Gil (Department of Electrophysics, Kwangwoon University) ;
- Cho, Won-Tea (Jusung Engineering CO., Ltd.) ;
- Park, Sang-Gi (Jusung Engineering CO., Ltd.) ;
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Choi, Eun-Ha
(Department of Electrophysics, Kwangwoon University) ;
- Kwon, Gi-Chung (Department of Electrophysics, Kwangwoon University)
- Published : 2010.02.17
Abstract
In order to achieve a high efficient a-Si solar cell, the TCO (transparent conductive oxide) substrates are required to be a low sheet resistivity, a high transparency, and a textured surface with light trapping effect. Recently, a zinc oxide (ZnO) thin film attracts our attention as new coating material having a good transparent and conductive for TCO of solar cells. In this paper the optical properties of
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