Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2010.02a
- /
- Pages.450-450
- /
- 2010
Uniform field emission on ink-jet printed CNT emitters through oxygen trimming
- Song, Dae-Hun ;
-
Yun, Ho-Gyu
;
-
Han, Jong-Hun
;
- Kim, Seong-Hyeon ;
-
Lee, Gyeong-Il
;
-
Lee, Cheol-Seung
;
-
Lee, Nae-Seong
;
- Lee, Han-Seong
- 송대훈 (전자부품연구원) ;
-
윤호규
(고려대학교 신소재공학과) ;
-
한종훈
(전자부품연구원) ;
- 김성현 (전자부품연구원) ;
-
이경일
(전자부품연구원) ;
-
이철승
(전자부품연구원) ;
-
이내성
(세종대학교 반도체공학과) ;
- 이한성 (세종대학교 반도체공학과)
- Published : 2010.02.17
Abstract
Recently, field emission emitters made by carbon nanotubes(CNTs) and ink-jet method have been extensively studied due to their low cost, little limitation of size and a high resolution. When CNT emitters are operated, a few highly protruded ones generate most of the emission currents that cause spatial nonuniformity. In this study, we applied selective oxidation to solve this problem on ink-jet printed CNT emitters. Consequently, O2 exposures to field emitting CNT arrays give rise to a permanent damage selectively on the highly emitting CNTs. In spite of turn-on field increase, emission images was showed remarkably uniform after oxygen trimming.
Keywords