Bias effect on the chemical structure and hardness during deposition of carbon nitride film by RF magnetron sputtering

  • Published : 2010.02.17

Abstract

$CN_x$ films fabricated by different deposition techniques to synthesize of $\beta-C_3N_4$ involve two problems; nitrogen deficiency and $sp^2$ hybridized bonding. Nitrogen contents in most of the thin films are lower than stoichiometric composition 57%

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