Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2010.02a
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- Pages.243-243
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- 2010
Bias effect on the chemical structure and hardness during deposition of carbon nitride film by RF magnetron sputtering
- No, Gi-Min (KAIST) ;
- Yu, Sin-Jae ;
- Kim, Jeong-Hyeong ;
- Seong, Dae-Jin ;
- Choe, Si-Gyeong (KAIST)
- Published : 2010.02.17
Abstract
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