Dependence of reaction temperature on the properties of CdS thin films grown by Chemical Bath Deposition

Chemical Bath Deposition으로 성장한 CdS 박막의 반응온도에 대한 특성

In this paper, CdS thin films, which were widey used window layer of the CdS/CdTe and the CdS/$CuInSe_2$ heterojunction solar cell, were grown by chemical bath deposition, and effects of temperature of reaction solution on the structural properties were investigated. Cadmium acetate and thiourea were used as cadmium and sulfur source, respectively. And ammonium acetate was used as the buffer solution. The reaction velocity was increased with increasing temerature of reaction solution. For temperature <= $85^{\circ}C$, as increasing temperature of solution, deposition rate of CdS films was increased by ion-by-ion reaction in the substrate surface, and the crystallinity of the films was improved. However, for temperature <= $55^{\circ}C$, deposition rate was decreased resulting from smaller Cd2+ ion, and the grain size was decreased.

본 연구에서는 CdTe 및 $CuInSe_2$ 태양전지의 광투과층으로 사용되는 CdS 박막을 chemical bath deposition으로 제조하고, 반응용액의 온도에 따른 미세구조의 변화를 조사하였다. CdS 박막의 결정구조와 미세구조는 기판의 종류에 큰 변화 없이 $85^{\circ}C$ 까지는 반응용액의 온도가 증가함에 따라 기판에서의 ion-by-ion 성장이 촉진되어 CdS 박막의 성장률이 증가하며, 결정성이 향상되고 continuous하면서 매우 조밀한 미세구조를 가졌다. 그러나 온도가 $55^{\circ}C$ 이하의 경우 CdS 형성에 필요한 Cd2+ 이온의 공급이 느려져 온도에 따라 증착률이 감소하였다. 또한 핵생성 위치 수가 감소하여 입자의 크기가 증가하였고, 박막 내부에는 void가 형성되어 균일하지 못한 미세구조를 나타내었다.