Crystalline phases and magnetic properties of $Ni_xFe_{100-x}$ thin films deposited on Si(100) and $SiO_2$/Si(100) substrate by co-sputtering

동시 스퍼터링법으로 Si(100) 및 $SiO_2$/Si(100) 기판에 증착된 $Ni_xFe_{100-x}$ 박막의 결정상 및 자기적 특성 변화

  • Kang, Dae-Sik (Electronic Components Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Nam, Joong-Hee (Electronic Components Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Song, Jong-Han (Electronic Components Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Cho, Jeong-Ho (Electronic Components Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Chun, Myoung-Pyo (Electronic Components Center, Korea Institute of Ceramic Engineering and Technology)
  • 강대식 (한국세라믹기술원 전자부품센터) ;
  • 남중희 (한국세라믹기술원 전자부품센터) ;
  • 송종한 (한국세라믹기술원 전자부품센터) ;
  • 조정호 (한국세라믹기술원 전자부품센터) ;
  • 전명표 (한국세라믹기술원 전자부품센터)
  • Published : 2009.12.06