글로우 방전 플라즈마 진단 특성

The Characteristics of Glow Discharge Plasma Diagnosis

  • 발행 : 2009.05.07

초록

We have studied on plasma diagnosis, characteristics of the glow discharge at the several different conditions of pressure, discharge current and such. The discharge onset voltage and onset current decreased as pressure increase, the general trend was nearly in agreement with the left regions of Paschen's curve. As normal glow discharge, discharge voltage was constant according to discharge current.

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