한국조명전기설비학회:학술대회논문집 (Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference)
- 한국조명전기설비학회 2009년도 춘계학술대회 논문집
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- Pages.372-375
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- 2009
글로우 방전 플라즈마 진단 특성
The Characteristics of Glow Discharge Plasma Diagnosis
초록
We have studied on plasma diagnosis, characteristics of the glow discharge at the several different conditions of pressure, discharge current and such. The discharge onset voltage and onset current decreased as pressure increase, the general trend was nearly in agreement with the left regions of Paschen's curve. As normal glow discharge, discharge voltage was constant according to discharge current.
키워드