초록
Transparent conductive metal oxide films of $In_{2-x}Ti_xO_3$ (ITiO) and $In_{2-x}Sn_xO_3$ (ITO) were deposited by RF magnetron sputtering at substrate temperature of $300^{\circ}C$ and at high rate (${\sim}10$nm/min). Electrical and optical properties of the films were investigated as well as film structure and morphology, as it is compared with the commercial F:$SnO_2$ (FTO) glass. Near infrared ray transmittance of ITiO is the highest for wavelengths over 1000nm, which can increase dye sensitized compared to ITiO and FTO. Dye-sensitized solar cells (DSCs) were fabricated using the ITiO, ITO and FTO. Photoconversion efficiency (${\eta}$) of DSC using ITiO is 5.5%, whereas 5.0% is obtained from DSC with ITO. both at 100 mW/$cm^2$ light intensity.
