Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2009.02a
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- Pages.283.2-283.2
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- 2009
Effect of the working pressure on hydrogenated bonding and chemical structure during deposition of carbon nitride film by RF magnetron sputtering
- Roh, Ki-Min (KAIST) ;
- Choi, Si-Kyung (KAIST) ;
- You, Shin-Jae ;
- Seong, Dae-Jin ;
- Kim, Jung-Hyung
- Published : 2009.02.11
Abstract
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