Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2009.02a
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- Pages.277.1-277.1
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- 2009
Investigation of Gas Injection Effect in Inductively Coupled Plasma with Fluorocarbon Plasma
- Hwang, Jin-Ha (Department of Chemical Engineering, Sungkyunkwan University) ;
- Kim, Min-Shik (Department of Chemical Engineering, Sungkyunkwan University) ;
- Park, Keun-Ju (Department of Chemical Engineering, Sungkyunkwan University) ;
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Chae, Hee-Yeop
(Department of Chemical Engineering, Sungkyunkwan University)
- Published : 2009.02.11
Abstract
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