Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2009.02a
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- Pages.275.1-275.1
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- 2009
Wave-cutoff method as a monitoring tool of the plasma uniformity and pressure
- Na, Byung-Keun (Korea Advanced Institute of Science and Technology) ;
- Ahn, Seung-Kyu (Korea Advanced Institute of Science and Technology) ;
- You, Kwang-Ho (Korea Advanced Institute of Science and Technology) ;
- Seo, Sang-Hun (Korea Advanced Institute of Science and Technology) ;
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Chang, Hong-Young
(Korea Advanced Institute of Science and Technology)
- Published : 2009.02.11
Abstract
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