Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2009.02a
- /
- Pages.255.1-255.1
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- 2009
Effect of growth temperature of Ga doped ZnO thin films by pulsed DC magnetron sputtering
- Kim, Ju-Ho (Korea Research Institute of Chemical Technology, Device Materials Research Center) ;
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An, Ki-Seok
(Korea Research Institute of Chemical Technology, Device Materials Research Center)
;
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Lee, Sun-Sook
(Korea Research Institute of Chemical Technology, Device Materials Research Center)
;
- Nam, Eun-Kyoung (Sungkyunkwan University, Department of Physics) ;
- Kim, Young-Sung (Sungkyunkwan University, Advanced Materials Process of Information Technology)
- Published : 2009.02.11
Abstract
Keywords