한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2009년도 제36회 동계학술대회 초록집
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- Pages.172.1-172.1
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- 2009
Effect of thickness and $O_2$ flow rate on the properties of ITO thin films deposited by RF magnetron sputtering for RGB LED applications
- 발행 : 2009.02.11