Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

2009.02a
/
Pages.170.2-170.2
/
2009

The Korean Vacuum Society (한국진공학회)

권호 표지

Effect of annealing gas in MONOS capacitors with blocking oxide grown by radical oxidation process

Kim, H.D. (Korea University) ;
An, H.M. (Korea University) ;
Seo, Y.J. (Korea University) ;
Zhang, Y. (Korea University) ;
Nam, K.H. (Kwangwoon University) ;
Cho, W.J. (Kwangwoon University) ;
Kim, T.G. (Korea University)

Published : 2009.02.11

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