한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2009년도 제36회 동계학술대회 초록집
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- Pages.107.2-107.2
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- 2009
TONOS (TiN-Oxide-Nitride-Oxide-Si) Flash Memory with ONO and NON Tunneling Barriers
- Jung, Myung-Ho (Department of Electronic Materials Engineering, Kwangwoon University) ;
- Kim, Kwan-Su (Department of Electronic Materials Engineering, Kwangwoon University) ;
- Park, Goon-Ho (Department of Electronic Materials Engineering, Kwangwoon University) ;
- Oh, Se-Man (Department of Electronic Materials Engineering, Kwangwoon University) ;
- Chung, Hong-Bay (Department of Electronic Materials Engineering, Kwangwoon University) ;
- Lee, Young-Hie (Department of Electronic Materials Engineering, Kwangwoon University) ;
- Jung, Jong-Wan (Department of Nano Science and Technology, Sejong University) ;
- Cho, Won-Ju (Department of Electronic Materials Engineering, Kwangwoon University)
- 발행 : 2009.02.11