Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2009.08a
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- Pages.370-370
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- 2009
Study on effect of pre-existing plasma on the characteristics of local sheath plasma
- Park, Yeong-Shin (Department of Nuclear Engineering, Seoul National University) ;
- Chung, Kyung-Jae (Samsung Electronics Co., Ltd.) ;
- Kim, Yun-Jae (Samsung Electronics Co., Ltd.) ;
- Kim, Jin-Hyun (Department of Nuclear Engineering, Seoul National University) ;
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Hwang, Yong-Seok
(Department of Nuclear Engineering, Seoul National University)
- Published : 2009.08.19
Abstract
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