한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2009년도 제37회 하계학술대회 초록집
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- Pages.221-221
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- 2009
Cu diffusion behavior in SiOC(-H) films with annealed Cu/SiOC(-H)/p-Si(100)/Al metal-insulator-semiconductor(MIS) structures
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Choi, Chi-Kyu
(Nano Thin Film Materials Laboratory, Department of Physics, Cheju National University)
;
- Lee, Heang-Seuk (Nano Thin Film Materials Laboratory, Department of Physics, Cheju National University) ;
- Woo, Jong-Kwan (Nano Thin Film Materials Laboratory, Department of Physics, Cheju National University) ;
- Kim, Chang-Young (Nano Thin Film Materials Laboratory, Department of Physics, Cheju National University)
- 발행 : 2009.08.19