Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2009.08a
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- Pages.78-78
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- 2009
The formation of dense Si nanocrystals in Si/$Si_3N_4$ superlattices by the ultra high vacuum ion beam sputtering deposition
- Seo, Se-Young (Division of Industrial Metrology, Korea Research Institute of Standards and Science) ;
- Kim, In-Yong (Department of Physics, Korea Advanced Institute of Science and Technology) ;
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Kim, Young-Heon
(Division of Industrial Metrology, Korea Research Institute of Standards and Science)
;
- Kim, Kyung-Joong (Division of Industrial Metrology, Korea Research Institute of Standards and Science)
- Published : 2009.08.19
Abstract
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