한국소성가공학회:학술대회논문집 (Proceedings of the Korean Society for Technology of Plasticity Conference)
- 한국소성가공학회 2009년도 추계학술대회 논문집
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- Pages.267-270
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- 2009
정수압을 이용한 미세 패턴 전사 신공정 개발
Development of New Micro Pattern Fabrication Process by U sing Isostatic Pressing
- 발행 : 2009.10.08
초록
In the present investigation, we are newly developing a new forming process which can fabricate micro patterns on large-area polymeric substrates for high speed mass production. The key idea of the new process is to pressurize multiple vacuum-packed substrate-mold stacks above the glass transition temperature (