한국광학회:학술대회논문집 (Proceedings of the Optical Society of Korea Conference)
- 한국광학회 2009년도 동계학술발표회 논문집
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- Pages.133-134
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- 2009
Nano-fabrication of Superconducting Electrodes for New Type of LEDs
- Huh, Jae-Hoon (Research Institute Electronic Science (RIES), Hokkaido University) ;
- Endoh, Michiaki (Research Institute Electronic Science (RIES), Hokkaido University) ;
- Sato, Hiroyasu (Research Institute Electronic Science (RIES), Hokkaido University) ;
- Ito, Saki (Research Institute Electronic Science (RIES), Hokkaido University) ;
- Idutsu, Yasuhiro (Research Institute Electronic Science (RIES), Hokkaido University) ;
- Suemune, Ikuo (Research Institute Electronic Science (RIES), Hokkaido University)
- 발행 : 2009.02.12
초록
Cold temperature development (CTD) of electron beam (EB) patterned resists and subsequent dry etching were investigated for fabrication of nano-patterned Niobium (Nb). Bulky Nb fims on GaAs substrates were deposited with EB evaporation. Line patterns on Nb cathode were fabricated by EB patterning and reactive ion etching (RIE). Size deviations of nano-sized line patterns from CAD designed patterns are dependent on the EB total exposure, but it can be improved by CTD of EB-exposed resist. Line patterns of 10 to 300 nm widths of EB-exposed resist patterns were drawn under various exposure conditions of
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