한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2009년도 하계학술대회 논문집
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- Pages.418-418
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- 2009
Water - Assisted Efficient Growth of Multi-walled Carbon Nanotubes by Thermal Chemical Vapor Deposition
- Choi, In-Sung (Faculty of Nanotechnology and Advanced Materials Engineering, Sejong University) ;
- Jeon, Hong-Jun (Faculty of Nanotechnology and Advanced Materials Engineering, Sejong University) ;
- Kim, Young-Rae (Faculty of Nanotechnology and Advanced Materials Engineering, Sejong University) ;
- Lee, Nae-Sung (Faculty of Nanotechnology and Advanced Materials Engineering, Sejong University)
- 발행 : 2009.06.18
초록
Vertically aligned arrays of multi-walled carbon nanotube (MWCNT) on layered Si substrates have been synthesized by water-assisted thermal chemical vapor deposition (CVD). We studied changes in growth by parameters of growth temperature, growth time, rates of gas and annealing time of catalyst. Also, We grew CNTs by adding a little amount of water vapor to enhance the growth of CNTs.