한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)

한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
권호 표지

펄스레이저 증착법을 이용한 대면적 BSTO 박막의 성장

Growth of Large Area BSTO Thin Films using Pulsed Laser Deposition

  • 강대원 (한국전자통신연구원 신소재/소자연구부 테라전자연구팀) ;
  • 곽민환 (한국전자통신연구원 신소재/소자연구부 테라전자연구팀) ;
  • 강승범 (한국전자통신연구원 신소재/소자연구부 테라전자연구팀) ;
  • 백문철 (한국전자통신연구원 신소재/소자연구부 테라전자연구팀) ;
  • 최상국 (한국전자통신연구원 신소재/소자연구부 테라전자연구팀) ;
  • 김성일 (한국전자통신연구원 신소재/소자연구부 테라전자연구팀) ;
  • 류한철 (한국전자통신연구원 신소재/소자연구부 테라전자연구팀) ;
  • 김지선 (한국전자통신연구원 신소재/소자연구부 테라전자연구팀) ;
  • 정세영 (한국전자통신연구원 신소재/소자연구부 테라전자연구팀) ;
  • 정동철 (한국전자통신연구원 신소재/소자연구부 테라전자연구팀) ;
  • 강광용 (한국전자통신연구원 신소재/소자연구부 테라전자연구팀) ;
  • 이병영 (한밭대학교 재료공학과)
  • Kang, Dae-Won (Tera Electronics Research Team, New Devices & Devices Research Department, Electronics and Telecommunications Research Institute) ;
  • Kwak, Min-Hwan (Tera Electronics Research Team, New Devices & Devices Research Department, Electronics and Telecommunications Research Institute) ;
  • Kang, Seong-Beom (Tera Electronics Research Team, New Devices & Devices Research Department, Electronics and Telecommunications Research Institute) ;
  • Paek, Mun-Cheol (Tera Electronics Research Team, New Devices & Devices Research Department, Electronics and Telecommunications Research Institute) ;
  • Choi, Sang-Kuk (Tera Electronics Research Team, New Devices & Devices Research Department, Electronics and Telecommunications Research Institute) ;
  • Kim, Sung-Il (Tera Electronics Research Team, New Devices & Devices Research Department, Electronics and Telecommunications Research Institute) ;
  • Ryu, Han-Cheol (Tera Electronics Research Team, New Devices & Devices Research Department, Electronics and Telecommunications Research Institute) ;
  • Kim, Ji-Seon (Tera Electronics Research Team, New Devices & Devices Research Department, Electronics and Telecommunications Research Institute) ;
  • Jeong, Se-Young (Tera Electronics Research Team, New Devices & Devices Research Department, Electronics and Telecommunications Research Institute) ;
  • Chung, Dong-Chul (Tera Electronics Research Team, New Devices & Devices Research Department, Electronics and Telecommunications Research Institute) ;
  • Kang, Kwang-Yong (Tera Electronics Research Team, New Devices & Devices Research Department, Electronics and Telecommunications Research Institute) ;
  • Lee, Beong-Young (Department of Material Engineering, Hanbat National University)
  • 발행 : 2009.06.18
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초록

We have grown large area BSTO($(Ba_{1-x}Sr_x)TiO_3$) thin films (x=0.4) on 2 inch diameter MgO (001) single crystal substrates using a pulse laser deposition(PLD) system. Substrate temperature and oxygen pressure in the deposition chamber, and the laser optics for ablating a target have been controlled to obtain the uniform thickness and preferred orientation of the films. Results of x-ray diffraction and rocking curve analysis revealed that the BSTO films were grown on MgO substrates with a preferred orientation (002), and the full width half maximum of the rocking curve was measured to be 0.86 degree at optimum condition. Roughness of the films have been measured to be $3.42{\AA}$ rms by using atomic force microscopy. We have successfully deposited the large area BSTO thin films of $4000{\AA}$ thickness on 50 mm diameter MgO substrates.

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