Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Design and Fabrication of microheaters based oil polycrystalline 3C-SiC with large uniform-temperature area for high temperature

다결정 3C-SiC 기반으로 한 넓은 범위에서 균일한 온도 분포를 갖는 초고온용 마이크로 히터 설계 및 제작

  • 정재민 (울산대학교 전기전자정보시스템공학과) ;
  • 정귀상 (울산대학교 전기전자정보시스템공학과)
  • Published : 2009.06.18
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Abstract

This paper presents the fabrication and characteristics of microheaters, built on AlN(0.1 um)/3C-SiC(1 um) suspended membranes. Pt was used as microheater and temperature sensor materials. The results of simulated are shown that AlN/3C-SiC membrane has more large uniform-temperature area than $SiO_2$/3C-SiC membrane. Resistance of temperature sensor and power consumption of microheater were measured and calculated. Pt microheater generates the heat of about $550^{\circ}C$ at 340 mW and TCR of Pt temperature sensor is about 3188 ppm/$^{\circ}C$.

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