한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2009년도 하계학술대회 논문집
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- Pages.135-136
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- 2009
$BCl_3/Ar/Cl_2$ 유도결합 플라즈마를 이용한 ZnO 박막의 식각특성 연구
Etch characteristics of ZnO thin films using an inductively coupled plasma
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우종창
(중앙대학교 전자전기공학부) ;
- 엄두승 (중앙대학교 전자전기공학부) ;
- 양설 (중앙대학교 전자전기공학부) ;
- 허경무 (중앙대학교 재생에너지학과) ;
- 박정수 (중앙대학교 전자전기공학부) ;
- 하태경 (중앙대학교 전자전기공학부) ;
- 위재형 (중앙대학교 재생에너지학과) ;
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주영희
(중앙대학교 전자전기공학부) ;
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김동표
(중앙대학교 전자전기공학부) ;
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김창일
(중앙대학교 전자전기공학부)
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Woo, Jong-Chang
(School of Electrical and Electronics Engineering, Chung-Ang University) ;
- Um, Doo-Seung (School of Electrical and Electronics Engineering, Chung-Ang University) ;
- Yang, Xuel (School of Electrical and Electronics Engineering, Chung-Ang University) ;
- Heo, Keyong-Moo (School of Regeneration Energy, Chung-Ang University) ;
- Park, Jung-Soo (School of Electrical and Electronics Engineering, Chung-Ang University) ;
- Ha, Tae-Kyung (School of Electrical and Electronics Engineering, Chung-Ang University) ;
- Wi, Jae-Hyung (School of Regeneration Energy, Chung-Ang University) ;
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Joo, Young-Hee
(School of Electrical and Electronics Engineering, Chung-Ang University) ;
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Kim, Dong-Pyo
(School of Electrical and Electronics Engineering, Chung-Ang University) ;
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Kim, Chang-Il
(School of Electrical and Electronics Engineering, Chung-Ang University)
- 발행 : 2009.06.18
초록
The etching characteristics of Zinc Oxide (ZnO) and etch selectivity of ZnO to