Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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The characteristics of Ga, B-codoped ZnO (GZOB) thin film on $O_2$ plasma treated PC substrate

$O_2$ 플라즈마로 처리한 PC기판 위에 성장된 GZOB 박막의 특성

  • Yu, Hyun-Kyu (School of Information and Communication Engineering, SungKyunKwan University) ;
  • Lee, Jong-Hwan (School of Information and Communication Engineering, SungKyunKwan University) ;
  • Lee, Tae-Yong (School of Information and Communication Engineering, SungKyunKwan University) ;
  • Hur, Won-Young (School of Information and Communication Engineering, SungKyunKwan University) ;
  • Lee, Kyung-Chun (School of Information and Communication Engineering, SungKyunKwan University) ;
  • Shin, Hyun-Chang (School of Information and Communication Engineering, SungKyunKwan University) ;
  • Song, Joon-Tae (School of Information and Communication Engineering, SungKyunKwan University)
  • 유현규 (성균관대학교 정보통신공학부) ;
  • 이종환 (성균관대학교 정보통신공학부) ;
  • 이태용 (성균관대학교 정보통신공학부) ;
  • 허원영 (성균관대학교 정보통신공학부) ;
  • 이경천 (성균관대학교 정보통신공학부) ;
  • 신현창 (성균관대학교 정보통신공학부) ;
  • 송준태 (성균관대학교 정보통신공학부)
  • Published : 2009.06.18
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Abstract

In this study we investigated the characteristics of GZOB thin film on $O_2$ plasma treated Polycarbonate substrate using DC magnetron sputtering method. In our experiments results, GZOB thin film on $O_2$ plasma treated Polycarbonate substrate showed low resistivity than As-grown GZOB thin film, and visible transmission of 85% with a thickness 400 nm. Compared with As-Grown the electrical properties of GZOB were relatively improved by $O_2$ plasma treated substrate. From these results, we could confirm the suitable GZOB thin films for transparent electrode.

Keywords