Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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The Effect of the substrate temperature on the properties of GZOB films by DC magnetron sputtering

DC 마그네트론 스퍼터링법으로 증착한 GZOB 박막의 기판온도에 따른 특성

  • Lee, Jong-Hwan (School of Information & Communication Engineering, SungKyunKwan Univ.) ;
  • Yu, Hyun-Kyu (School of Information & Communication Engineering, SungKyunKwan Univ.) ;
  • Lee, Kyung-Chun (School of Information & Communication Engineering, SungKyunKwan Univ.) ;
  • Hur, Won-Young (School of Information & Communication Engineering, SungKyunKwan Univ.) ;
  • Lee, Tae-Yong (School of Information & Communication Engineering, SungKyunKwan Univ.) ;
  • Song, Joon-Tae (School of Information & Communication Engineering, SungKyunKwan Univ.)
  • 이종환 (정보통신공학부, 성균관대학교) ;
  • 유현규 (정보통신공학부, 성균관대학교) ;
  • 이경천 (정보통신공학부, 성균관대학교) ;
  • 허원영 (정보통신공학부, 성균관대학교) ;
  • 이태용 (정보통신공학부, 성균관대학교) ;
  • 송준태 (정보통신공학부, 성균관대학교)
  • Published : 2009.06.18
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Abstract

In this study, We investigated the effects of substrate temperature on the electrical and optical properties of Ga-, B-codoped ZnO(GZOB) thin films. GZOB thin films were deposited on glass substrate with various substrate temperature in the range from R.T. to $500\;^{\circ}C$ by DC magnetron sputtering. In the reslt, GZOB films at $400\;^{\circ}C$ exhibited a low resistivity value of $8.67\;{\times}\;10^{-4}\;{\Omega}-cm$, and a visible transmission of 80% with a thickness of 300 nm. This result indicated that the addition of Ga and B in ZnO films leads to the improvement of conductivity and transparent. From the result, we can confirm the possibility of the application as transparent conductive electrodes.

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