Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2009.06a
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- Pages.52-52
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- 2009
InSbTe phase change materials deposited in nano scaled structures by metal organic chemical vapor deposition
MOCVD법에 의해 나노급 구조 안에 증착된 InSbTe 상변화 재료
- Ahn, Jun-Ku (Chungnam National Univ.) ;
- Park, Kyung-Woo (Chungnam National Univ.) ;
- Cho, Hyun-Jin (Chungnam National Univ.) ;
- Hur, Sung-Gi (Chungnam National Univ.) ;
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Yoon, Soon-Gil
(Chungnam National Univ.)
- Published : 2009.06.18
Abstract
To date, chalcogenide alloy such as